一种亚波长偏振分波/合波器的研制  

Development of Broadband Polarizing Beam Splitter/Combiner

作　　者：张亮[1] 李承芳[1] 刘文[2] 周立兵[2] 吴国阳[2] 王定理[2] 

机构地区：[1]武汉大学物理科学与技术学院,武汉430072 [2]武汉邮电科学研究院光迅科技公司,武汉430072

出　　处：《光学学报》2006年第7期1048-1052,共5页Acta Optica Sinica

摘　　要：针对传统偏振分束器窄波段、窄角度范围的不足,研制了一种在宽波段宽角度范围内具有180°分光功能的偏振分束器/耦合器。该器件基于线栅偏振器和亚波长光栅结构原理设计,利用半导体工艺的刻蚀技术制作。利用一维金属线栅对入射电磁波的偏振响应和亚波长光栅仅存在零级衍射的特性,实现了较宽的通带宽度与可接受角度范围、极大的分光角度、高消光比和低插入损耗。实验测得透射、反射消光比均大于20 dB,插入损耗小于0.5dB。通过自行搭建的微结构测试平台,测量了p、s光的透射率、反射率随入射角度变化的曲线,和严格耦合波理论模拟结果符合。深入分析了制作中的过刻蚀对性能产生的影响。To Overcome the shortages of conventional polarizing beam splitters, narrow waveband and limited angle range, a polarizing beam splitter/combiner with wide waveband and angle range of 180° is developed. The device is designed with the principle of wire grid polarizer and subwavelength grating structure, and etched with semiconductor technique. Large pass width, acceptable angle and beam splitting angle, high extinction ratio and low insert loss are achieved based on that there exists only zeroth-order diffraction for the polarizing response of one- dimensional metal wire grid polarizer on the incident electromagnetic wave and subwavelength grating. The experiment verifies that the transmission and reflection extinction ratio is beyond 20 dB, insert loss below 0.5 dB. On the home-constructed microstructure testing platform, the transmissivity and reflectivity variation with the incident angle for the p and s components is obtained, which agrees well with simulated result by the rigorous coupled wave approach. The influence of excessive etching on the performance of the beam splitter/combiner during fabrication is analyzed deeply.

关 键 词：集成光学 偏振分束器 反应离子刻蚀 严格耦合波理论 亚波长光栅 消光比 

分 类 号：TN256[电子电信—物理电子学] O436.3[机械工程—光学工程]