双材料微梁阵列室温物体红外成像  

Bi-material mircocantilever array room-temperature IR imaging

作　　者：缪正宇[1] 张青川[1] 陈大鹏[2] 伍小平[1] 李超波[2] 郭哲颖[1] 董凤良[1] 熊志铭[1] 

机构地区：[1]中国科学技术大学,中国科学院材料力学行为和设计重点实验室,合肥230027 [2]中国科学院微电子研究所,北京100029

出　　处：《物理学报》2006年第7期3208-3214,共7页Acta Physica Sinica

基　　金：国家重点基础研究发展计划(973)计划(批准号:2006CB300404);国家自然科学基金(批准号:10232030;50076040和10472111)资助的课题.~~

摘　　要：针对近年出现的新概念光学读出双材料微梁阵列红外成像技术,提出了具有热变形放大效果的无硅基底回折腿间隔镀金的微梁单元结构,并建立了其热机械模型,在模型分析基础上,成功的设计制作了100×100像素的焦平面阵列(focalplanearray,FPA).在构建的红外成像系统中,实现了对室温物体——人体的热成像,噪声等效温度差约为200mK.实验结果与热机械模型的分析一致.The uncooled IR thermal imaging technology with its wide applications in military, medical and industrial areas has been an active topic in international research. Thermal imaging based on optical readout bi-material microcantilever array is a new concept in methodology. In this paper, a new kind of bi-material micro-cantilever unit with multi-fold legs and interval gild structure is designed and its thermal and thermo-mechanical performance are analylized. A 100 × 100 microcantilever array is fabricated as a FPA （focal plane array）, and by using this FPA, a thermal image of a room-temperature body （human body） is successfully detected. The NETD （ noise-equivalent temperature difference） is about 200mK. The experimental results are well accordant with the thermal analysis of the microcantilever unit.

关 键 词：非制冷红外成像 光学读出 双材料微梁阵列 

分 类 号：TN219[电子电信—物理电子学]