触针式轮廓测量机构的动态分析及非线性误差的消除  

Dynamic analysis and nonlinear error elimination of the stylus-based profile measuring mechanism

作　　者：王云庆[1] 李庆祥[1] 周兆英[1] 薛实福[1] 

机构地区：[1]清华大学精密仪器与机械学系

出　　处：《仪器仪表学报》1996年第6期606-611,共6页Chinese Journal of Scientific Instrument

摘　　要：在接触式轮廓测量仪中，性能优良的测量机构是实现高精度轮廓测量的关键。本文介绍了一种新型的十字片贫弹性支承的测量机构，建立了数学模型，对该机构的动态进行了分析，并得到触针测量力变化规律。同时，通过合理设计位移传感器的安装角度，消除了测量中的非线性二次项误差，保证了测量结果的真实性。In the stylus profilometer,a measuring mechanism with good mechanicalperformance is the key to achieve high precision of measuring profile. The paper proposes anew measuring mechanism adopting' the cross-leaf spring elastic bearing. On the basis ofbuilding a math model,the dynamic characteristic of mechanism is analyzed in detail and thevariational pattern of stylus force is attained. In the meantime,nonlinear quadratic error inthe measurement is eliminated by means of designing the installing angle of transducer reasonably. Therefore, the true measuring result is guaranteed.

关 键 词：轮廓仪 片簧支承 测量力 非线性误差 位移传感器 

分 类 号：TP216.1[自动化与计算机技术—检测技术与自动化装置] TH89[自动化与计算机技术—控制科学与工程]