朗谬尔探针用于VAC等离子体诊断的初步研究  

LANGMUIR PROBE AS A DIAGNOSTIC TOOL FOR PLASMA IN VACUUM ARC COATING(VAC) PROCESSES

作　　者：程仲元[1] 邹积岩[1] 杨磊[1] 张汉明[1] 

机构地区：[1]华中理工大学

出　　处：《应用科学学报》1996年第4期475-480,共6页Journal of Applied Sciences

摘　　要：简要分析了朗谬尔（Ｌａｎｇｍｕｉｒ）探针用于真空电弧镀膜（ＶＡＣ）等离子体诊断的可行性及理论适用性问题．介绍了一种可用于ＶＡＣ等离子体在线监测的探针诊断系统，并利用此系统分析了不同工艺参数下等离子体参数的变化．This paper discusses the feasibility of using the Langumir probe as adiagnostic tool for plasma in Vacuum Arc Coating (VAC) processes, and thevalidity of probe theories in this situation. A system has been set up for the insitu diagnesis of VAC plasma. Plasma parametere have been diagnosed nudervarious process parameters.

关 键 词：等离子体诊断 朗谬尔探针 真空电弧镀膜 

分 类 号：TB43[一般工业技术]