新型压电步进式二维精密驱动器  

Novel sophisticate stepping 2-DOF piezoelectric actuator

作　　者：刘国嵩[1] 杨志刚[1] 曾平[1] 程光明[1] 

机构地区：[1]吉林大学机械工程学院,吉林长春130025

出　　处：《光学精密工程》2006年第4期602-606,共5页Optics and Precision Engineering

基　　金：国家"863"计划资助项目(No.2002AA423150);国家自然科学基金资助项目(No.50475010)

摘　　要：设计了新型压电步进式精密二维驱动器。以压电叠堆为驱动元件,在单体柔性结构上实现直线和旋转驱动二维精密驱动。同时利用独特的双侧对称箝位结构,保证工作的稳定性和准确性。进行了二维驱动器的有限元分析,通过大量试验研究,证明二维驱动器达到基本设计功能。试验结果表明:二维驱动器的旋转驱动分辨率达到0.45μrad,行程360°,速度达到0.04 rad.s-1时,扭矩可达0.2 N.m;直线驱动分辨率40 nm,行程20 mm,速度19.2 mm.min-1时,驱动力可达近10 N,可实现2自由度精密驱动。By taking a piezoelectric stack as actuator element to realize 2-DOF precision driving in linear and rotary actuators arranged on flexible processing structure, a new piezoelectric stepping style precision 2-DOF actuator was designed. The stability and precision of the system was ensured by using unique double symmetry structure of anchoring/loosing. The finite element analysis of 2-DOF actuator combining with lots of experiments research proved the basic functions of the 2-DOF actuator. The test results show rotary driving of 2-DOF actuator reaches 0. 45μrad in resolution, 18 mm in travel, 0.04 rad · s^-1 in velocity and 0.2 N · m in torque; linear driving reaches 40 nm in resolution, 20 mm in travel, 19.2 mm·min ^-1 in velocity and 10 N in driving power approximately.

关 键 词：二维驱动器 压电叠堆 柔性铰链 精密驱动 有限元分析 

分 类 号：TN384[电子电信—物理电子学] TH703.6[机械工程—仪器科学与技术]