浮法玻璃在线镀复合膜的力学性能  

MECHANICAL CHARACTERISTIC OF COMPOSITE THIN FILMS COATED BY ON-LINE DEPOSITION ON FLOAT GLASS

作　　者：赵洪力[1] 蔡永秀[1] 杨雪梅[1] 刘广利[1] 张福成[1] 

机构地区：[1]燕山大学河北省亚稳材料制备技术与科学重点实验室

出　　处：《硅酸盐学报》2006年第8期917-921,共5页Journal of The Chinese Ceramic Society

基　　金：河北省自然科学基金(E2004000241)资助项目

摘　　要：用化学气相沉积法在浮法玻璃上制备了复合薄膜。用台阶仪、纳米压痕和X射线衍射分别测定了薄膜厚度、弹性模量、纳米硬度和室温时薄膜的残余应力。实验结果表明:薄膜厚度为560.7nm,弹性模量为48.33GPa,纳米硬度值为10.65GPa,计算得到薄膜的残余应力值为-0.19GPa。对膜厚、气体的配比、流量、玻璃板的厚度、玻璃基体的化学成分等因素对薄膜残余应力的影响进行了讨论。Composite film was prepared by on-line chemical vapor deposition on float glass. The film thickness, elastic modulus, nano-hardness and residual stress at room temperature were investigated by stepmeter, nano-indentation and X-ray diffraction. The experimental results show that the thickness of the composite film is 560.7 nm, its elastic modulus is 48.33 GPa, and its nano-hardness is 10.65 GPa. The calculated value of the residual stress is -0.19 GPa. The effect of film thickness, quantity and proportion of precursor gases, thickness and chemical composition of glass substrate on the residual stress of the thin film was discussed.

关 键 词：浮法玻璃 化学气相沉积 复合膜 纳米压痕 残余应力 

分 类 号：TQ171.72[化学工程—玻璃工业]