特种压阻式加速度传感器的研制  

Research on Special Piezoresistive Acceleration Sensor

作　　者：赵立波[1] 赵玉龙[1] 蒋庄德[1] 

机构地区：[1]西安交通大学机械工程学院

出　　处：《西安交通大学学报》2006年第9期1049-1052,共4页Journal of Xi'an Jiaotong University

基　　金：国家高技术研究发展计划MEMS重点基金资助项目(2004AA404220);国家自然科学基金资助项目(50475085;50535030);教育部新世纪优秀人才支持计划资助项目(NFCT-05-0842)

摘　　要：通过动力学分析和有限元模拟,设计出了具有高过载保护功能的加速度传感器结构.采用微型机械电子系统技术和集成电路工艺制作出了高精度、高灵敏度的硅微固态压阻平膜芯片,通过玻璃粉烧结工艺将其键合在弹性梁的应力集中处,利用激光焊接工艺,制造了量程为±20 km/s2、过载能力为30倍满量程的特种压阻式加速度传感器.实验表明,在对传感器施加集中载荷和动态冲击的条件下,传感器可达到静态精度为0.86%满量程、动态响应频率为3.43 kHz的技术指标,从而满足了非常规武器在触发控制等特殊领域的应用要求.Utilizing the dynamics analysis and finite element simulation, the acceleration sensor s mechanical structure with high overload protection capability was designed. The micro electro-mechanical system （MEMS） and integrated circuit technology were adopted to manufacture the solid piezoresistive silicon flat chip with high precision and sensitivity, and packaged on the concentrated stress location of an elastic beam by glass powder sintering, and the special piezoresistive acceleration sensor was developed with the measurement range of ±20 km/s^2 and the overload capability of 30 times full scale （FS） via laser welding. Under applying point load and dynamic shock to the sensor, the experiments show that the sensor achieves the index of static precision 0.86%FS and dynamic response frequency 3. 434 kHz which can meet the requirements of the trigger control technology for the unconventional weapon.

关 键 词：微型机械电子系统 固态压阻平膜芯片 弹性梁 高过载 加速度传感器 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]