激光干涉测量中的误差分析与补偿  

Error Analysis and Compensation in Laser Interferometry

作　　者：刘君[1] 穆海华[1] 孙业业[1] 周云飞[1] 

机构地区：[1]华中科技大学,武汉430074

出　　处：《机床与液压》2006年第9期181-184,共4页Machine Tool & Hydraulics

摘　　要：介绍了双频激光干涉仪的测量原理,从安装和测量等方面深入分析了激光干涉测量所固有的系统误差、阿贝误差及余弦误差、环境误差及延时误差,讨论了各种误差对测量结果的影响,并给出了相应的误差补偿方法。The measuring principle of dual - frequency laser interferometer was introduced. On the basis of process of installation and measurement, the inherent error of interferometer, the Abel error and cosine error, the environmental error and the delay error were analyzed. The effect of these errors upon the measurement was discussed. And the compensation methods for the primary error were given.

关 键 词：激光干涉测量 误差分析 误差补偿 

分 类 号：TH741[机械工程—光学工程]