基于DSP的伺服控制系统在非球面检测平台上的研究  

Study on Servo Control System Based on DSP of Measurement Platform for Optical Aspheric Surface

作　　者：杨平[1] 郭隐彪[1] 刘建春[2] 

机构地区：[1]厦门大学微纳米加工与检测联合实验室,福建厦门361005 [2]厦门大学机电工程系,福建厦门361005

出　　处：《厦门大学学报（自然科学版）》2006年第5期638-642,共5页Journal of Xiamen University：Natural Science

基　　金：国家"863"计划(8638042416)项目;厦门大学创新团队资助

摘　　要：根据高精度非球面表面检测的要求,提出一种用于微纳精度测量的非球面检测平台伺服控制系统.系统基于高性能数字信号处理器(以下简称DSP)芯片控制技术,采用德州仪器(Ti)公司的TMS320F2812运动控制开发板对三轴伺服电机进行实时控制.系统硬件上设计了DSP外围驱动电路,实现了对交流伺服系统的控制.反馈电路采用模块化设计,完成了对电机编码器和直线光栅尺输出信号的采集.在Windows操作系统下,用CCS2.0开发工具完成了DSP芯片软件上编程,包括数字比例-积分-微分(以下简称PID)算法,数字测速M/T法等,简化了外围硬件设计.系统具有完整的DSP芯片的运动函数编程以及硬件模块的扩展功能.最后通过实验在双轴工作平台上进行定位分析和稳定性仿真,系统达到较高的位置控制.In order to realize the high precision measurement of aspheric surface,a servo control system used for the micro-nanom- eter accuracy measurement platform for optical aspheric surface is established. The system is based on the control technology of high performance digital signal processor （DSP） chip. The chip is TMS320F2812 produced by Texas Instrument Incorporated. It is used as a real-time processor for the 3-axis servo motor. Under windows operating system and CCS2.0, the software development is accom- plished. The software functions include digital proportion-integral-derivative （PID） controller and M/T method that simplify the peripheral hardware circuit. The system is designed to achieve the aims of motion control and expanded the hardware module. The stability of the system is analyzed by simulation. The results show that the system has better performance in positioning control.

关 键 词：非球面 检测 数字信号处理器 伺服电机 运动控制 

分 类 号：TH741[机械工程—光学工程]