基于谐振原理的高精度石英加速度计设计技术  

Technology of high precision quartz accelerometer design based on resonant principle

作　　者：裴荣[1] 周百令[1] 李宏生[1] 李坤宇[1] 

机构地区：[1]东南大学仪器科学与工程系,南京210096

出　　处：《东南大学学报（自然科学版）》2006年第5期732-735,共4页Journal of Southeast University：Natural Science Edition

摘　　要：基于力学振动原理,导出谐振器振动的微分方程,讨论了振梁型加速度计的设计原理.提取谐振加速度计的特征参量,进行结构尺寸优化设计和非线性误差分析.依据石英晶体压电效应原理,对相关激励方式进行研究和合理切型选择与电极设置.应用有限元法进行工作模态和力频特性等方面的仿真与分析.理论计算的力频系数和软件仿真相差小于4%,证明了理论模型的正确性.Based on mechanics of vibration, the resonant differential equation of resonator is derived, and the design principle is discussed for the vibrating beam accelerometer. Extracting the characteristic parameter from resonance accelerometer, the structure is optimized and the non-linear error is analyzed. According to the piezoelectricity effect of quartz, the encouraging way, shear selection and electrode configuration are analyzed and discussed. The analyses of its modes and forcefrequency characteristic are implemented by the finite element analysis tool. The difference of forcefrequency factor between simulation results and calculated results are less than 4 percent and the theoretic models are proved to be correct and reliable. All these researches are helpful to design high precision accelerometer.

关 键 词：加速度计 谐振 有限元 设计 

分 类 号：U666.1[交通运输工程—船舶及航道工程]