沉积类金刚石膜过程对钛箔基体性能和组织的影响  

Effect of Deposition of DLC Films on Property and Microstructure of Ti Foil

作　　者：谢致薇[1] 袁镇海[1] 郑健红[1] 罗广南[1] 戴达煌[1] 邓其森[1] 

机构地区：[1]广州有色金属研究院

出　　处：《金属热处理》1996年第11期16-18,共3页Heat Treatment of Metals

基　　金："真空阴极电弧沉积类金刚石膜研究及其应用"课题

摘　　要：本文采用真空阴极电弧沉积方法，研究在成型Ｔｉ箔上沉积类金刚石（ＤＬＣ）膜以制备ＤＬＣ／Ｔｉ复合扬声器振膜过程中，Ｔｉ箔性能与组织的变化时发现，镀膜前的“轰击”处理使Ｔｉ箔发生完全再结晶，基体显微硬度下降；随后的镀膜过程使基体显微硬度回升，其回升幅度主要与沉积速率、沉积温度、膜层厚度等因素有关。伴随硬度的回升，显微组织出现进一步的细化。沉积ＤＬＣ膜过程中的这种“双重强化”效应在实际场合中是十分有用的。Property and microstructure change of Ti foil during deposition of DLC films with vacuum cathodic arc method is studied in order to prepare DLC/Ti diaphragm. The results show that microhardness of Ti foil decreases by recrystallization during ion bombard and increases again during film deposition, which is related to process parameters such as deposition rate, environment temperature, film thickness etc. Crystal grain refines with the increase of microhardness. This is related to film stress. The strengthening effect for Ti foil during DLC film deposition process is very useful.

关 键 词：沉积 类金刚石膜 显微组织 钛箔 钛 

分 类 号：TG146.23[一般工业技术—材料科学与工程]