新型快速准分子激光微加工方法制备毛细管电泳芯片的研究  

A New High-Speed Excimer Laser Micromachining Method for PMMA Based Capillary Electrophoresis Chip

作　　者：刘莹[1] 姚李英[1] 任康宁[2] 吴坚[1] 刘世炳[1] 罗国安[1] 陈涛[1] 

机构地区：[1]北京工业大学激光工程研究院,北京100022 [2]清华大学分析中心,北京100084

出　　处：《传感技术学报》2006年第05B期2004-2007,共4页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金资助(50335050)

摘　　要：选用聚合材料聚甲基丙烯酸甲酯(PMMA)代替玻璃,石英等作为毛细管电泳芯片的基片材料.在19kV,5Hz及5mm/min的加工参数下,采用新型快速准分子激光微加工方法完成了毛细管电泳芯片的制备.实验结果表明该方法加工过程简单,耗时短,自动化程度高,有效提高了芯片成品率和加工质量.芯片与相同尺寸的盖片在105℃、160N、恒温20min条件下通过热压键合在一起,得到密闭性好的整体芯片.最后在芯片上应用激光诱导荧光检测法对Cy5染料完成了分离检测,获得了重复性很好的检测信息.Polymaths Methacrylate （PMMA） was chosen as the substrate instead of glass or quartz. A new high-speed excimer laser micro-machining technique was adopted as the fabrication method. A PMMA based electrophoresis chip was fabricated under 19 kV, 5Hz and 5mm/min parameters. The method with simple processing, short time consuming and auto characters can effectively increase the rate of production and the quality of chips. The chip was bonded together with another same size cover chip under 105℃, 160N and holding time 20 min using hot bonding method. The bonded chip can seal micro fluid well and endure high pressure. In the end, the Cy5 dye was successfully separated on the chip using laser-induced fluorescence detection method and got higher repeatedly detection information.

关 键 词：毛细管电泳芯片 准分子激光 微加工 刻蚀 聚合物 

分 类 号：TN249[电子电信—物理电子学]