MEMS技术检测爆炸物的原理与研究进展  

Development of Explosive Detection with MEMS

作　　者：孔德义[1] 诸建彬 齐永光 林丙涛 张正勇 张涛[1] 路巍[1] 

机构地区：[1]中国科学院合肥智能机械研究所传感技术国家重点实验室,合肥230031

出　　处：《传感技术学报》2006年第05B期2096-2099,共4页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金资助(60574093)

摘　　要：本文对国内外采用MEMS技术检测爆炸物的方法进行了分类,主要将其分为测温法、位移法、压阻法、谐振法等,分别介绍了它们的检测原理,分析了在灵敏度、选择性、抗环境干扰能力、系统集成与小型化等方面它们各自的潜在优势以及不足之处。同时,对近十年来该研究领域的进展和现状作了简要回顾,这些研究目前基本上都还处于实验室阶段,在真正达到实用化前还需要解决选择性、稳定性、抗环境干扰等技术难题。The development of explosive detection with MEMS technology was briefly reviewed. Various detecting methods were classified in microcalorimetric spectroscopy, displacement measuring with light reflecting,strain monitoring with piezoresistance,and resonance frequency shift measuring. The principle of each method were respectively introduced, its advantage and the disadvantage were discussed. However, research in this area is still at experimental status, qualifications such as identification accuracy, robust, noise-proof still need to be improved before application.

关 键 词：MEMS 爆炸物检测 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TB41[自动化与计算机技术—控制科学与工程]