基于共振隧穿二极管的GaAs悬臂式声传感器研究  

Research of Cantilever Acoustic Sensor Based on Resonant Tunneling Diode

作　　者：张文栋[1] 王建[1] 薛晨阳[1] 熊继军[1] 张斌珍[1] 仝召民[1] 

机构地区：[1]中北大学电子测试技术国家重点实验室,山西太原030051

出　　处：《传感技术学报》2006年第05B期2293-2296,共4页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金资助(50405025;50375050)

摘　　要：实验研究了基于AlAs/InxGa1-xAs/GaAs共振隧穿二极管(RTD)的振荡器的压力-频率转换特性,实验结果表明:该特性具有良好的线性特征,且其线性灵敏度达到0.84kHz/MPa.利用此压力-频率转换特性,首次设计并利用微机械控制孔技术加工制作了基于RTD的GaAs基悬臂式声传感器结构,实现了RTD与GaAs基微机械加工技术的工艺集成.The Pressure-frequency transform characteristics of oscillator based on AlAs/InxGa1-xAs/GaAs resonant tunneling diode （RTD） have been investigated. The experiment results show that the characteristic is linear and the linear sensitivity is up to 0.84 KHz/MPa. Using the pressure-frequency characteristic, the GaAs cantilever acoustic sensor based on RTD is designed and processed by the control hole technology firstly, and the process integration of RTD and micro-mechanical technology is implemented.

关 键 词：RTD振荡器 压力-频率特性 GAAS 悬臂式声传感器 

分 类 号：TN312.2[电子电信—物理电子学]