基于Krylov子空间投影法的MEMS宏建模方法  

MEMS Macromodeling Based on Krylov Subspace Projection Method

作　　者：闫子健[1] 苑伟政[1] 吕湘连[1] 李俊[1] 常洪龙[1] 

机构地区：[1]西北工业大学微/纳米系统实验室,西安710072

出　　处：《传感技术学报》2006年第05A期1319-1322,共4页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金资助项目(50375125);博士点基金资助项目(2003069903;20040699009)

摘　　要：基于Krylov子空间投影法结合有限元分析(FEA)建立了一种宏模型提取方法,以便能够在系统级快速地建立器件宏模型.这种方法通过对整个2D或3D器件有限元分析的结果提取宏模型.基于这种方法建立的宏模型具有计算代价低、精度合适的特点,而且能方便地插入到系统级仿真器进行仿真.文中通过一个谐振器结构阐释了这一方法,并且针对所建立的谐振器结构宏模型进行了精确性验证.Based on Krylov subspace projection method and finite element analysis, we had obtained an approach to construct device macromodel. These reduced-order macromodels could be obtained by extracting data from the fully 2D or 3D meshed model runs. The macromodels generated by this method have the characteristics of low computational expense, acceptable precision, easily inserted into a system lever simulator for simulation. As an example, the method was demonstrated by capturing the behavior of a comb resonator, furthermore, the resonator macromodel＇s characteristics were verified with the full finite element model.

关 键 词：MEMS CAD 宏模型 物理级 KRYLOV子空间 

分 类 号：TP391.72[自动化与计算机技术—计算机应用技术]