基于弯曲测试的纳米结构机械力学特性的表征  

Mechanical Characterization of Nanostructures Using Nanobending-Based Test

作　　者：徐临燕[1] 栗大超[1] 胡小唐[1] 张海霞[2] 黄玉波[1] 

机构地区：[1]天津大学精密测试技术及仪器国家重点实验室 [2]北京大学微米纳米加工技术国家重点实验室

出　　处：《传感技术学报》2006年第05A期1493-1496,1499,共5页Chinese Journal of Sensors and Actuators

基　　金：国家重点基础研究发展计划(973)资助项目(G1999033109)

摘　　要：利用原子力显微镜对聚焦离子束刻蚀技术制备的不同纵横比的氮化硅纳米梁结构进行了弯曲测试,并讨论了一种标定原子力显微镜微悬臂梁弹簧常数的方法.实验中严格界定了欧拉细长梁的条件,在分析了纳米梁组纵横比对测试结果影响的基础上,讨论了如何修正弯曲测试结果.弯曲测试得到了纳米梁的平面模数,并进一步推算氮化硅材料的杨氏模量.测试结果验证了基于原子力显微镜系统的弯曲方法测试纳米薄膜材料杨氏模量的可行性.Nanobending testing on silicon nitride nanobeams with different aspect ratios processed using focus iron beam technique is proceeded based on atomic force microscope （AFM）. A simply method for calibrating the spring constant of the microcantilever of an AFM is discussed. The conditions for a slender Euler beam is strictly defined. On the basis of analyzing the influence of the aspect ratios of the nanobeam group on the testing results, the way to correcting the nanobending results is also discussed. The plate modulus is obtained in the experiment, and the Young＇s modulus of the material of silicon nitride is abstracted further. The testing results verify the feasibility of the nanobending method for testing the Young＇s modulus of nano film materials based on an AFM.

关 键 词：弯曲测试 原子力显微镜 力学性能 平面模数 杨氏模量 聚焦离子束刻蚀 

分 类 号：TP212.12[自动化与计算机技术—检测技术与自动化装置]