应用于纳米测量机的MEMS微接触式测头的结构设计和优化  

Structure Design and Optimization of MEMS Micro Tactile Probe for NMM

作　　者：李源[1] 栗大超[1] 胡小唐[1] 赵大博[1] 郭彤[1] 陈津平[1] 

机构地区：[1]天津大学测试技术及仪器国家重点实验室,天津300072

出　　处：《传感技术学报》2006年第05A期1512-1515,共4页Chinese Journal of Sensors and Actuators

摘　　要：为了提高MEMS微接触式测头的性能,系统开展了测头的结构设计和参数优化.根据测头结构各个部分的设计目标,提出了测头悬挂系统拓扑结构的设计方案.基于测头结构的力学模型,提出了结构参数对测头性能的影响机理,并采用有限元方法对测头的测杆、中心连接体、梁等结构参数进行了仿真优化,获得了符合测头整体性能设计要求的参数及应力分布曲线.To improve the performance of MEMS micro tactile probe, the structure design and parameter optimization of probe are developed. According to the design demands of all parts of probe, several topological structures of suspending parts are presented. Based on mechanic analytic module of probe, affect mechanism of probe performance by structure parameters is presented, as the result, dimensional parameters of stylus, intermediate body, and beam are emulated and optimized. The appropriate parameters and stress curves that meet the probe＇s performance requirements are acquired.

关 键 词：MEMS 微接触式测头 纳米测量机 结构设计 优化 

分 类 号：TP212.13[自动化与计算机技术—检测技术与自动化装置]