硅谐振微传感器中微弱信号频率的外差式随机共振检测  

The Weak Signal Frequency in Silicon Resonance Microsensor Measurement Based on Heterodyne Stochastic Resonance Method

作　　者：黄咏梅[1] 林敏[1] 

机构地区：[1]中国计量学院计量技术工程学院,杭州310018

出　　处：《传感技术学报》2006年第05A期1542-1544,共3页Chinese Journal of Sensors and Actuators

基　　金：浙江省自然科学基金资助项目(Y104338)

摘　　要：硅谐振微传感器输出信号的信噪比很低,频率信号往往淹没在噪声之中.论文分析了随机共振系统的功率谱放大率和信噪比特性,提出了外差式随机共振频率检测方法,并将该方法应用于硅谐振微传感器输出信号的频率检测.理论分析和数值仿真结果表明,外差式随机共振能将更多的噪声能量转变为频率信号的能量,通过调节载波信号频率可从共振谱峰的变化中准确测定谐振频率.该方法是可行、有效的.The SNR of silicon resonance microsensor output signal is low. The frequency of signal is always submerged in noise. The SPA and SNR of stochastic resonators system are analyzed. A signal frequency measurement method based on beterodyne stochastic resonance is proposed to detect silicon resonance microsensor output signal frequency. The results of theoretical analysis and numerical simulation manifest that the energy of noise can be transferred to signal frequency through the heterodyne stochastic resonance method. The resonance frequency can be determined accurately from the resonance spectrum peak through adjusting carrier wave signal frequency. The method is effective and can be realized.

关 键 词：MEMS 硅谐振微传感器 微弱信号 外差式 随机共振 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TN911.23[自动化与计算机技术—控制科学与工程]