一种用于测试坡莫合金薄膜机械性能的拉伸模型  

A Method for Measuring Mechanical Properties of Permalloy Thin Films

作　　者：李雪萍[1] 丁桂甫[1] 安藤妙子[2] 式田光宏[2] 佐藤一雄[2] 

机构地区：[1]上海交通大学微纳科学技术研究院薄膜与微细技术教育部重点实验室微米/纳米加工技术国家级重点实验室,上海200030 [2]名古屋大学微纳系统工程系

出　　处：《传感技术学报》2006年第05A期1595-1598,共4页Chinese Journal of Sensors and Actuators

基　　金：博士后科学基金资助(2005038145)

摘　　要：坡莫合金(Ni80Fe20)薄膜是微机电系统常用的磁性材料之一.介绍了一种用于测试其机械性能的单轴拉伸试验模型.此模型的特点是微小试件两端固定、且与加载机构集成在基片上,从而可减少操作工作量、提高对准精度.整个机构以微细加工方法制成:坡莫合金拉伸试件以光刻和电镀技术成型,其余的加载机构以湿法蚀刻制成.实验表明:使用此机构可以简单且高精度地对薄膜试件进行拉伸试验,获得多项力学性能参数,从而为MEMS器件设计和分析提供可靠的理论基础.Permalloy （Ni80Fe20） thin film is one of the magnetic materials for MEMS. A uniaxial tensile test method for measuring mechanical properties of this material is presented. Its characterizations are the both-ends fixed specimen and the integrated loading mechanism on the substrate; therefore it can eliminate the troublesome of manipulating and aligning the specimen. The on-chip device is microfabricated by wet etching, and the permalloy tensile specimen is shaped by lithographic and electroplating processes. The experiments showed that using this method could conduct simply, precisely tensile test on permalloy thin film specimens and obtain their mechanical properties. Finally it can provide reliable parameters for designing and analyzing MEMS devices.

关 键 词：微机电系统 机械性能 坡莫合金 拉伸试验 

分 类 号：TG115[金属学及工艺—物理冶金]