微测辐射热计微桥结构性能分析  

Performance Analysis of Microbolometer Microbridge Structure

作　　者：李素[1] 吴志明[1] 蒋亚东[1] 杨晓瑜[1] 李世彬[1] 

机构地区：[1]电子科技大学光电信息学院,成都610054

出　　处：《传感技术学报》2006年第05A期1728-1730,共3页Chinese Journal of Sensors and Actuators

摘　　要：微测辐射热计的设计难点是起支撑作用的微桥结构的设计.重点研究了现在流行的几种微桥结构,对其性能参数进行分析比较,提出了多层结构的优点.并使用有限元分析软件对不同微桥进行结构分析,以比较其稳固性.In the course of designing a microbolometer, It is the most difficult to design microbridge structure. On the basic of analyzing and comparing several popular microbridge structures , the high quality of multi-level structure has been point out. Its distributing of stress is simulated by finite element analysis software in order to compare their fixedness.

关 键 词：微测辐射热计 微桥结构 热参数 有限元 

分 类 号：TN491[电子电信—微电子学与固体电子学]