薄膜体声波滤波器的材料、设计及应用  

Materials, Devices Design and Applications of Thin Film Bulk Acoustic Wave Filters

作　　者：蒋松涛[1] 吴孟强[1] 吴勇[1] 张树人[1] 

机构地区：[1]电子科技大学电子薄膜与集成器件国家重点实验室,成都610054

出　　处：《材料导报》2006年第11期21-24,共4页Materials Reports

基　　金：四川省青年基金(JS0303001)资助项目

摘　　要：薄膜体声波谐振器及滤波器具有工作频率高、工艺简单、尺寸小、易于集成等优点,成为目前应用于高频通信前置滤波器的首选。系统介绍了用于薄膜体声波谐振器的几种主要材料(AlN、ZnO、PZT)的具体特点、制备工艺及薄膜体声波谐振器与滤波器的结构、设计及其应用。Film bulk acoustic resonators （FBAR） and BAW filters have many advantages, such as high operation frequency, being small in size and easy for fabrication and integration, and so on. It becomes fit for modern communication applications. The properties and fabrications of some major materials for FBAR such as AlN, ZnO, PZT are introduced systematically, and the structures, devices design and applications of BAW filters are discussed as well.

关 键 词：体声波 谐振器 滤波器 压电薄膜 

分 类 号：TN65[电子电信—电路与系统]