基于分形特征的表面微观形貌模拟和分析  

Simulation and Analysis of Surface Topography Based on Fractal Characterization

作　　者：陆涛[1] 曹伟[1] 师汉民[1] 张鸿海[1] 

机构地区：[1]华中理工大学机械科学与工程学院

出　　处：《华中理工大学学报》1996年第7期22-24,共3页Journal of Huazhong University of Science and Technology

基　　金：国家自然科学基金

摘　　要：用Ｗ－Ｍ模型模拟了分形表面并用所设计的分形算法对其进行分形分析，分析结果与理论值相符，最后，用该分形算法对ＳＴＭ检测的超精密表面微观形貌进行分析．ased on a brief discussion of the random fractal theory, the fractal surface is simulated with a W-M model and analyzed with the fractal algorithm developed. The result agrees with the theoretical value. It has been proved that the fractal dimension is independent of the parameter measured such as the resolution. The super-precise surface topography measured with scanning tunnel microscope is analyzed with the fractal algorithm.

关 键 词：表面微观形貌 随机分形 W-M模型 STM 

分 类 号：TG801[金属学及工艺—公差测量技术]