面向微装配的压电陶瓷微夹钳建模与控制  

Modeling and control of a piezoelectric microgripper for micro assembly

作　　者：陈国良[1] 黄心汉[2] 王敏[2] 

机构地区：[1]武汉理工大学机电学院,武汉430070 [2]华中科技大学控制科学与工程系,武汉430074

出　　处：《高技术通讯》2006年第11期1134-1138,共5页Chinese High Technology Letters

基　　金：863计划（2005AA844120）和国家自然科学基金（60275013）资助项目.

摘　　要：建立了悬臂梁位移与外电场和外力之间的动静态模型以及压电陶瓷迟滞环的Backlash算子模型。以所建立的迟滞模型为前馈环节与PID反馈构成复合控制对悬臂梁进行位置控制。现场测试数据验证了该模型的正确性和复合控制方法的可行性，并分别用逆控制、PID控制以及复合控制方法进行了正弦曲线跟踪实验，这些控制方法的比较结果表明，复合控制策略具有最高的控制精度。For the microgripper fabricated by a pair of piezoelectric cantilever beams to handle mieroobjects of a sub-millimeter size with the more precise positioning capability, the static and dynamic models between the displacement of the microgripper and the external electric field and force were established, and the hysteretic model of piezoceramics based on Backlash operator was also founded. A hybrid control scheme, including a feedforward segment of the established hysteresis model and a feedback segment of a PID controller, was conducted to perform the position-based impedance control. The testing data of the experiments validated that these established models were correct. The experimental results of the sinusoid tracking by inverse control, PID control and the hybrid control respectively indicated that the hybrid control scheme had the best control accuracy.

关 键 词：压电陶瓷 微夹钳 动静态模型 迟滞模型 复合控制 

分 类 号：TP242[自动化与计算机技术—检测技术与自动化装置]