一种新型MEMS微驱动器的设计与仿真分析  

Design and simulation of a new MEMS microactuator

作　　者：张永华[1] 王艳[1] 丁桂甫[1] 马骏[1] 赵小林[1] 蔡炳初[1] 

机构地区：[1]上海交通大学微纳科学技术研究院,上海200030

出　　处：《传感器与微系统》2006年第12期85-88,共4页Transducer and Microsystem Technologies

基　　金：国家"863"计划资助项目(2003AA404140);国家自然科学基金资助项目(10377009);教育部科学技术研究重大项目(0307)

摘　　要：提出并设计了具有双稳态功能的新型电磁型MEMS微驱动器结构形式。微驱动器由导磁的两端固支的扭梁、两端可自由摆动的悬臂梁,以及永磁体、下磁路和平面线圈组成。永磁体的使用,实现了器件的双稳态功能,从而可以得到低功耗的磁驱动器。通电线圈用来实现器件的姿态转换。对设计的器件进行了电磁仿真分析,验证了器件的双稳态机制,分析表明:铁芯的存在对器件功能有决定性的影响。A novel electromagnetic MEMS microactuator with bistable positions is presented. The proposed structure for the microactuator consists of a magnetic torsional beam with two fixed ends, a magnetic cantilever beam with two free ends, permanent magnets, magnetic path and double-layer planar coils. The cantilever beam has two stable positions due to the use of the permanent magnets, and a low-power-consumption microactuator will be obtained. The microactuator will switch from one stable position to the other one with the planar coils. The microactuator is simulated by the finite element method. The working mechanism for the bistability of the microactuator is verified. The result of simulation shows that iron core has a crucial effect on the function of the microacturator.

关 键 词：微电子机械系统 电磁型微驱动器 双稳态 有限元法 仿真分析 

分 类 号：TP271.4[自动化与计算机技术—检测技术与自动化装置]