沉积在聚合物表面上的金属薄膜自发形成图案的实验研究  

Experimental study of wrinkle patterns formed in metal thin film deposited onto polymer substrates

作　　者：赵小力[1] 董申[1] 孙涛[1] 李增强[1] 

机构地区：[1]哈尔滨工业大学精密工程研究所,黑龙江哈尔滨150001

出　　处：《电子显微学报》2006年第6期477-480,共4页Journal of Chinese Electron Microscopy Society

摘　　要：用离子溅射法在聚二甲基硅氧烷(polydimethylsiloxane,PDMS)表面沉积的金膜因金属与聚合物之间热膨胀系数的差异从而导致了具有正弦界面、微米尺度的波长和振幅的复杂而有序的褶皱图案。用光刻技术在硅片制备图形结构作为模板,通过复制模铸得到表面具有浮雕结构的聚二甲基硅氧烷基片。改变浮雕结构可以调控其上沉积的金膜的褶皱图案呈规则有序的排列。这种多尺度的复合结构将光刻技术、复制模铸和物理自组装等有效结合,可广泛应用于微纳制造领域。Comhination of lithographic and self-organized methods is a major goal in micro-and nanofabrication. Complex and ordered wrinkle patterns which have a uniform wavelength and amplitude, and sinuseidal section, were spontaneously created on metal thin films deposited by ion sputtering onto polydimethylsiloxane（PDMS） substrates owing to mismatch of thermal expansion index. These wrinkle structures could be modulated by patterned surface on polymer substrates. Hard masters based Si/SiO2 wafers were fabricated by photolithography. By replica molding, relief structures on polymer surface were replicated from hard masters. Modifying patterned structures in polymer surface can modulate wrinkle formation and its arrangement. These multidimensional structures with nano- and micrometer features that integrate photolithography, replica molding and physical self-assembly are useful in micro-and nanofabrication.

关 键 词：离子溅射 金属薄膜 聚二甲基硅氧烷PDMS 褶皱图案 

分 类 号：TN405[电子电信—微电子学与固体电子学]