纳电子器件制备的单根碳纳米管精确装配与电连接研究  

Study on single CNT's accurate assembly and electrical contact for fabricating nanoelectronic device

作　　者：田孝军[1] 王越超[1] 席宁[1] 董再励[1] 刘连庆[1] 于鹏[1] 李文荣[1] 

机构地区：[1]中国科学院沈阳自动化研究所机器人学重点实验室

出　　处：《电子显微学报》2006年第6期490-493,共4页Journal of Chinese Electron Microscopy Society

基　　金：国家自然科学基金资助项目(No.60575060;No.60575050);辽宁省优秀青年科研人才培养基金项目(No.2005220025).~~

摘　　要：目前,利用单根碳纳米管进行纳电子器件的研制成为纳电子学界研究的前沿与热点,但在纳电子器件研制过程中,如何实现单根碳纳米管与微电极的精确装配与电连接成为关键技术难题之一。为探索实现此关键技术的新方法,本文尝试将介电电泳与具有实时力/视觉反馈的原子力显微镜操作方法相结合,从而结合粗、精两级操作方式,来实现单根碳纳米管的精确装配与电连接。单根多壁碳纳米管的精确装配与电特性测试实验验证了该方法的有效性,从而为装配研制基于单根纳米管/线的纳电子器件提供了一种新颖可行的方法。Nowadays, nanoeletronic device based on single carbon nanotube （CNT） attracts much attention and many research works have been done on its fabrication, one of the key technical problems is how to realize accurate assembly and electrical contact between single CNT and microelectrode. An AC dieletrophoresis and AFM based nanomanipulation technology with real-time force/visual feedback combining coarse and accurate positioning was introduced. The assembly and electric properties measurement of single MWCNT verified the effectiveness of this method, and thus provides a new method for assembling and fabricating nanoeletronie device based on single nanotube, nanowire, etc.

关 键 词：介电电泳 原子力显微镜纳米操作 单根碳纳米管 精确装配 电连接 

分 类 号：TB383.1[一般工业技术—材料科学与工程]