流态床CVD法制氮化硅超微粉过程分析及实验验证  

Analysis and Verification of Silicon Nitride Super-micro Powder Synthesis with FBR-CVD Technique

作　　者：王勇[1] 周俊[2] 汪新颜[1] 姚奎鸿[1] 

机构地区：[1]浙江理工大学材料工程中心,杭州310018 [2]浙江理工大学图书馆,杭州310018

出　　处：《浙江理工大学学报（自然科学版）》2007年第1期36-39,共4页Journal of Zhejiang Sci-Tech University(Natural Sciences)

基　　金：国家自然科学基金(50442025);浙江理工大学博士启动基金(0403054-Y);浙江省教育厅资助项目(20040387)

摘　　要：分析了硅烷氨解法制备氮化硅超微粉的化学气相沉积(CVD)过程,讨论了制备氮化硅超微粉体的3个关键工艺要素,并采用立式双温区流态床实验装置实现氮化硅超微粉体的制备,获得粉体合成过程的一些关键控制参数。The process of silicon nitride super-micro powders synthesis are studied, especially of its thermodynamic and kinetics behavior, the critical factors for synthesis of silicon nitride powders in the fluidized bed have been discussed. The super-micro powders were successfully synthesized via chemical vapor deposition using silane and ammonia as reactants in a two-stage fluidized bed reactor, which were tested of nano scale, well uniformity and high purity. Furthermore, the optimal processing parameters presented in this paper will be contributed to following industrialization. The method provides a promising synthesis route for silicon nitride nanopowders.

关 键 词：流态床 CVD 氮化硅 硅烷 热力学 

分 类 号：TB383[一般工业技术—材料科学与工程]