界面梯度对TiN／不锈钢涂层应力的影响  

Influence of Gradient layer on TiN Coatings' Internal Stress

作　　者：李戈扬[1,2] 漆玄[1,2] 施晓蓉[1,2] 李鹏兴[1,2] 张流强[1,2] 郑永铭[1,2] 

机构地区：[1]上海交通大学金属基复合材料国家重点实验室 [2]中国工程物理研究院

出　　处：《功能材料》1996年第6期569-572,共4页Journal of Functional Materials

摘　　要：气相沉积表面涂层在科学技术各领域得到广泛应用，然而，由于涂层与基体在化学和物理性质上的差异，使得涂层与基体在界面两侧产生结构和性能上的突变，影响了涂层功能的充分发挥。为此，采用多靶磁控溅射技术制备了具有梯度过渡层的ＴｉＮ／不锈钢涂层，并研究了梯度层对涂层内应力的影响。研究结果表明：采用多靶磁控溅射技术，分别控制各靶的功率，能够精确控制梯度层的成份变化，制备不同厚度的镀层；应力分析显示，随梯度过渡层厚度的增加，涂层的内应力明显降低。Vacuum deposition surface coatings are widely used in areas of science and technology.Because of differences in chemical and physical properties between the coating and the substrate,a sharp change in structure and property is produced at two sides of the interface,which affects the function of the coating in use. TiN coatings on stainless steel with gradient layers have been deposited by a multi target magnttron spurttering system,and the effect of gradient layers on TiN coatings'internal stress has been studied.The results showed that the gradient layers whth different thickness and composition could be precisely made by multi target magnetron sputtering system,with control of the target power respectively.Stress measurements showed that the coatings'internal stress decreased obviously with increase of gradient layer thickness.

关 键 词：磁控溅射 界面梯度 涂层 内应力 不锈钢 氮化钛 

分 类 号：TG174.44[金属学及工艺—金属表面处理]