大面积光学多层膜玻璃  

SOME LARGE AREA GLASS OF OPTICAL MULTILAYER

作　　者：段永利[1] 许生 巴德纯[1] 范垂祯[2] 

机构地区：[1]东北大学机械工程与自动化学院,辽宁沈阳110004 [2]深圳豪威真空光电子股份有限公司,广东深圳518057

出　　处：《真空与低温》2006年第4期194-199,共6页Vacuum and Cryogenics

摘　　要：随着磁控溅射技术的不断进步,大面积光学多层膜玻璃也日渐发展,广泛地应用于建筑、汽车、平板显示等行业。对几种大面积光学多层膜玻璃的原理、应用以及制备技术分别作了简要介绍及评述。With the development of magnetron sputtering technology, large area glass of optical multilayer also made its progress gradtially. These productions were applied in the fields of architectural, automotive and flat panel display industries.A chief introduction and comment is given for the principles, applications and processes of several large area glass productions of optical multilayer.

关 键 词：大面积 光学多层膜 磁控溅射 

分 类 号：O484.1[理学—固体物理]