用迈克尔逊干涉仪测微定位工作台的位移  

Displacement of micropositioning table combined with Michelson interferometer

作　　者：姜坤[1] 朱若谷[1] 

机构地区：[1]中国计量学院计量技术工程学院,浙江杭州310018

出　　处：《中国计量学院学报》2006年第4期281-283,共3页Journal of China Jiliang University

摘　　要：将迈克尔逊干涉实验装置用于用压电陶瓷驱动和柔性铰链导向的一体化微定位工作台,通过实验研究了其位移与电压的关系.实验结果表明它们在限定的工作范围内具有良好的二次曲线关系.另外,还对影响系统定位的误差作了相关分析.The experimental equipments of Michelson interferometers, are used in micropositioning tables driven by piezoelectric actuators and a flexure hinge mechanism to guide the moving part and to provide preload for the piezoelectric actuators. The relationship between displacement and voltage is indicated through this experiment. Their results demonstrate good conic relationship if the implementation range is defined. The error affecting the positioning of the system is analyzed.

关 键 词：迈克尔逊干涉 压电陶瓷驱动器 微定位工作台 

分 类 号：TH741[机械工程—光学工程]