一种长波长MOEMS可调谐滤波器的结构设计和分析  

Design and Analysis of a Long Wavelength MOEMS Tunable Filter

作　　者：吴旭明[1] 王小东[1] 何国荣[2] 王青[2] 曹玉莲[2] 谭满清[1] 

机构地区：[1]中国科学院半导体研究所光电子研究发展中心,北京100083 [2]中国科学院半导体研究所纳米光电子实验室,北京100083

出　　处：《Journal of Semiconductors》2007年第1期117-121,共5页半导体学报（英文版）

摘　　要：提出了一种微光机电系统(MOEMS)可调谐滤波器结构,该结构采用GaAs/AlGaAs作为下分布布拉格反射镜(DBR),GaAs和SiO2/Si介质膜作为上DBR,空气作为腔.按照波分复用系统的性能要求对MOEMS可调谐滤波器各项参数,如带宽、峰值透射率、挠度和调谐速度等进行了分析和设计.研究了挠度和调谐速度与梁厚度、宽度、长度等参数的关系.结果表明挠度与长度成正方向变化,同梁厚度、宽度成反方向变化,而调谐速度与各参数的关系恰好相反.A novel MOEMS tunable filter is proposed. We choose GaAs/AIGaAs as the bottom distributed Bragg reflector （DBR） ,GaAs and SiO2/Si as the top DBR,and air as the cavity. Parameters of the device,such as the FWHM,transmittance, tuning deflection, and tuning velocity, are analyzed theoretically according to the demand of the WDM system. The influences of the depth h ,width b,and length L on tuning deflection and tuning velocity are investigated in detail. The tuning deflection increases with the increase of L and decreases with the increase of h and b,while the tuning velocity behaves in the opposite way.

关 键 词：微光机电系统 调谐 滤波器 

分 类 号：TN713[电子电信—电路与系统]