白光干涉轮廓仪工作台的设计及有限元分析  

Design and Analysis of 1-DOF Nano-positioning Stage

作　　者：戴蓉[1] 谢铁邦[2] 

机构地区：[1]武汉理工大学机电工程学院,武汉430070 [2]华中科技大学机械科学与工程学院,武汉430074

出　　处：《武汉理工大学学报》2007年第1期62-64,共3页Journal of Wuhan University of Technology

基　　金：国家自然科学基金(50175037)

摘　　要：研究开发了一种能实现大量程位移和纳米级定位精度的一维位移工作台。工作台采用了粗、精2级定位机构,以精密衍射光栅传感器组成工作台位移的闭环检测系统。文中对由压电陶瓷驱动和柔性铰链导向的精定位机构进行了力学建模分析,并对其进行了有限元仿真运算。设计的工作台已成功应用于白光干涉轮廓测量仪,文中给出了轮廓仪部分测量结果。A novel 1-DOF displacement stage with large motion range and nano-positioning precision was developed. The stage was a set of two grades mechanism, that was coarse and finepositioning mechanism. A diffraction grating was fixed to the stage to form a close loop displacement measuring system. The theory of mechanics was used to analysis the behavior of PZT actuated and flexure hinge guided fine positioning mechanism and the finite element analysis was also performed. The stage was used in the profiler of white-light interferomerty succssfully. A measuring example was also presented.

关 键 词：微定位工作台 柔性铰链 PZT驱动 有限元分析 轮廓测量 

分 类 号：TP24[自动化与计算机技术—检测技术与自动化装置]