Preparation of free-standing diamond films for high frequency SAW devices  

作　　者：刘健敏 夏义本 王林军 苏青峰 赵平 徐闰 彭鸿雁 史伟民 

机构地区：[1]School of Materials Science and Engineering,Shanghai University,Shanghai 200072,China [2]Department of Physics,Mudanjiang Normal College,Mudanjiang 157012,China

出　　处：《中国有色金属学会会刊：英文版》2006年第B01期298-301,共4页Transactions of Nonferrous Metals Society of China

基　　金：Projects(60577040) supported by the National Natural Science Foundation of China; Project(0404) supported by the Shanghai Foundation of Applied Materials Research and Development; Projects(0452nm051, 05nm05046) supported by the Nano-technology Project of Shanghai; Project(T0101) supported by the Shanghai Leading Academic Disciplines

摘　　要：Free-standing diamond films were prepared by hot filament chemical vapor deposition (HFCVD) method under different conditions. Inter-digital transducers (IDTs) were formed on the nucleation sides of free-standing diamond films by photolithography technique. Then piezoelectric ZnO films were deposited by radio-frequency(RF) reactive magnetron sputtering to obtain the ZnO/diamond film structures. Surface morphologies of the nucleation sides and the IDTs were characterized by means of scanning electron microscopy (SEM), atomic force microscope (AFM) and optical microscopy. The results indicate that the surfaces of nucleation sides are very smooth and the IDTs are of high quality without discontinuity and short circuit phenomenon. Raman spectra show the sharp diamond feature peak at about 1 334 cm?1 and the small amount of non-diamond carbon in the nucleation side. X-ray diffraction (XRD) patterns of the structure of ZnO/diamond films show a strong diffraction peak of ZnO (002), which indicates that as-sputtered ZnO films are highly c-axis oriented.Free-standing diamond films were prepared by hot filament chemical vapor deposition （HFCVD） method under different conditions. Inter-digital transducers （IDTs） were formed on the nucleation sides of free-standing diamond films by photolithography technique. Then piezoelectric ZnO films were deposited by radio-frequency（RF） reactive magnetron sputtering to obtain the ZnO/diamond film structures. Surface morphologies of the nucleation sides and the IDTs were characterized by means of scanning electron microscopy （SEM）, atomic force microscope （AFM） and optical microscopy. The results indicate that the surfaces of nucleation sides are very smooth and the IDTs are of high quality without discontinuity and short circuit phenomenon. Raman spectra show the sharp diamond feature peak at about 1 334 cmI and the small amount of non-diamond carbon in the nucleation side. X-ray diffraction （XRD） patterns of the structure of ZnO/diamond films show a strong diffraction peak of ZnO （002）, which indicates that as-sputtered ZnO films are highly c-axis oriented.

关 键 词：自立金刚石膜 化学汽相淀积 HFCVD 高频声表面波器件 ZNO 

分 类 号：TB383.2[一般工业技术—材料科学与工程]