基于MEMS技术的自适应光学系统的研究  

Adaptive optical system based on MEMS technology

作　　者：杨振刚[1] 陈海清[1] 李俊[1] 余洪斌[1] 

机构地区：[1]华中科技大学光电子科学与工程学院,湖北武汉430074

出　　处：《光电工程》2007年第2期1-4,共4页Opto-Electronic Engineering

基　　金：总装"十.五"基础研究基金项目资助课题

摘　　要：用自适应光学系统来校正由大气湍流等产生的波前畸变,能够得到很好的效果。通过对自适应光学系统的工作原理进行研究,提出了一种基于MEMS技术的微小型自适应光学系统校正波前畸变的方法,将MEMS技术应用于变形反射镜,并构建了具体的实验平台,用来校正一种人为产生的波前畸变,且阐述了具体的实验过程。实验结果表明,基于MEMS技术的自适应光学系统能够很好地闭环校正波前畸变,且其体积小、质量轻、校正性能稳定,为自适应光学技术在星载相机上的应用提供了依据。Correction of the wavefront error caused by the turbulence can get better effect with an adaptive optical system. A correction method of the micro-miniature adaptive optical system based on Micro Electromechanical System （MEMS） technology＇ was proposed by analyzing the working theory of the adaptive optical system. An experimental system including def6rmable mirror based on MEMS technology was designed to correct a factitious wavefront error, and the experimental process was expatiated in detail. The experimental results show that the adaptive optical system can preferably correct the wavefront error through closed loop control, and that its small volume, light weight and steady capability greatly support the application of adaptive optics in space camera.

关 键 词：自适应光学系统 MEMS技术 波前探测器 变形反射镜 波前校正 

分 类 号：TN247[电子电信—物理电子学]