静电悬浮微机械加速度计设计  

Design for electrostatically levitated micromechanical accelerometer

作　　者：刘云峰[1] 丁衡高[1] 董景新[1] 

机构地区：[1]清华大学精密仪器与机械学系,北京100084

出　　处：《清华大学学报（自然科学版）》2007年第2期181-185,共5页Journal of Tsinghua University(Science and Technology)

基　　金：国家"十五"科技攻关项目(41308050103)

摘　　要：设计了一种基于静电悬浮原理的微机械加速度计。它采用三明治结构的微敏感元件,电容式位移检测方案及静电力悬浮控制方案。着重对敏感元件的主要结构设计、参数的选取、支承静电力的计算以及量程极限、精度极限等问题进行了分析,表明在目前技术条件下,可以实现量程约5g,精度为10-5g的悬浮微加速度计。设计并加工出一种圆环形结构的敏感元件,已实现了Z轴方向的静电悬浮及加速度测量,证明设计方案是可行的,进一步研究可实现三轴悬浮加速度计。A micromechanical accelerometer was desigened based on the principle of electrostatic levitation. The device uses a sandwich micro sensor, capacitive position detection, and electrostatic levitation control. The sensor design is described along with the span of the main design parameters, calculations of the electrostatic force, and accuracy limitations. The analysis shows that a levitated accelerometer can be designed with a 5 g dynamic range and 10 s g accuracy. One ring-shaped sensing unit was designed and fabricated to verify levitation and acceleration detection along one axis. The design scheme will also be used to build a 3-axis levitated accelerometer.

关 键 词：导航设备 微机械 静电悬浮 加速度计 量程 

分 类 号：U666.1[交通运输工程—船舶及航道工程]