微谐振梁的激振与拾振研究(英文)  

Research on Excitation and Detection of Resonant Microbeam

作　　者：陈健[1] 陈德勇[1] 王军波[1] 杨苗苗[1] 毋正伟[1] 陈李[1] 

机构地区：[1]中国科学院电子学研究所传感技术国家重点实验室,北京100080

出　　处：《传感技术学报》2006年第6期2432-2436,共5页Chinese Journal of Sensors and Actuators

摘　　要：主要研究静电激励/电容拾振硅微谐振梁的激振拾振问题,推导谐振梁的激振与响应的等效数学模型,分析谐振梁的同频干扰问题,建立其等效电路模型,提出一种基于双端激励/双端检测的结构,能够有效的抑制干扰模态和消除同频信号干扰.The research on the excitation and detection of the electrostatically excited and capacitively detected resonant micro-beam has been conducted. The analytical model of excitation which illustrates the relationship between exciting force and the response of micro-beam has been deduced. The equivalent circuit model of the same-frequency disturbance of detection including three kinds of disturbance source has been proposed. A novel design based on double-differential excitation/ double-differential detection to tackle those disturbances has been put forward.

关 键 词：微机械电子系统 微谐振梁 模态提取 同频干扰 

分 类 号：TN305[电子电信—物理电子学]