用于油库安全监测的气体传感器研究与设计  

Investigation and Design of the Gas Sensor Applying to Oil-Storeroom

作　　者：程东升[1] 袁育杰[1] 孙以材[1] 潘国锋[1] 

机构地区：[1]河北工业大学信息工程学院,天津300130

出　　处：《传感技术学报》2006年第6期2509-2513,共5页Chinese Journal of Sensors and Actuators

基　　金：河北省重点学科资助项目

摘　　要：研究并设计了一种用于油库安全监测的气体传感器。传感器中气体敏感元件是利用直流磁控溅射法制备的Al掺杂ZnO薄膜。此薄膜对汽油等有机蒸汽有较高的敏感性和较短的响应(恢复)时间.当油气浓度较大时(大于1%),输出信号的变化仍较大.本传感器采用MAX197芯片,可以同时采集多个气敏元件的模拟信号并进行12位高精度A/D转换,利用无线收发模块F05C、J04E进行数据的无线传输.传感器拥有ACM12864液晶显示模块,方便数据显示.Investignting and designing a kind of gas sensor applying to oil-storeroom. The sensor element is the ZnO thin film doped Al, prepared by the sputtering deposition method with DC magnetron on alumina tube as substrate. The thin film has wonderful sensitivity and short response（recover） time to the gasolene vapor. When the concentration of the gas is much high（〉1%）,the change of output signals is also much bigger than other gas elements. This gas sensor adopted the chip MAX-197 which can collect analog signals from many sensor elements and transform them into digital signals in 12 bit precision. The sensor can transmit and receive the data by wireless using the F05C, J04E modules. Connecting the LCD module ACM12864,the sensor system makes the display clearand easy.

关 键 词：ZNO薄膜 高精度A/D转换 无线数据收发 液晶显示 

分 类 号：TP212.2[自动化与计算机技术—检测技术与自动化装置]