BST铁电薄膜在红外辐射作用下响应的解析解  

ANALYTICAL SOLUTION FOR RESPONSES OF A BST FERROELECTRIC THIN FILM UNDER INFRARED RADIATION

作　　者：李尧臣[1] 杨昌锦[1] 孙璟兰[2] 

机构地区：[1]同济大学航空航天与力学学院,上海200092 [2]中国科学院技术物理研究所红外实验室,上海200083

出　　处：《固体力学学报》2007年第1期37-42,共6页Chinese Journal of Solid Mechanics

基　　金：国家自然科学基金课题(10272081)资助

摘　　要：研究了红外探测器中红外焦平面列阵的象元—BST铁电薄膜微桥在红外辐射作用下输出信号的分析方法.将BST铁电薄膜微桥结构简化为一块微米尺度的夹层板,中间是BST铁电薄膜,在极化模式下工作.微桥的上表面接收辐射脉冲信号.由于微桥十分微小,可以认为红外辐射在板面上均匀分布,又由于板的平面尺寸比厚度大得多,可以认为热传导只在板厚的方向进行.采用适当的力-电-热耦合的控制方程和非线性的本构方程,得到了铁电薄膜微桥在红外辐射作用下的的力、热、电输出信号的解析解,并将计算结果与实验结果作了比较.The response of a microbolometer pixel structure -- the essential component part in infrared focal planar arrays of infrared detectors -- to infrared radiation was analyzed. The pixel structure was modeled as a composite laminate thin plate,whose size was measured with micron scale. Its middle ply was a BST ferroelectric thin film with the top surface covered by gold or platinum,and the lower one by platinum. Meanwhile both surfaces perform as a pair of electrodes. The top surface was receiving infrared radiation pulse. Since the microbolometer pixel was tiny, the infrared radiation was considered to be uniformly distributed on the top surface. Furthermore,as the ratio of the side length to the thickness of the plate was dramatically large,it was assumed that heat transfer only takes place along the thickness of the plate. The thermal-electric-mechanical coupling governing equations were solved in a form of Fourier series. Results of the temperature change and electric output signals of the microbolometer pixel structure under infrared radiation were obtained and compared with experimental data.

关 键 词：BST铁电薄膜 微桥结构 层合板 红外辐射 耦合方程 级数 

分 类 号：O484.4[理学—固体物理]