SOI器件高温环境实验智能控制系统  

Intelligence control system of higher temperature environmental test for SOI device

作　　者：张新[1] 王峙卫 高勇[1] 安涛[1] 刘梦新[1] 

机构地区：[1]西安理工大学,西安710048 [2]华东光电集成器件研究所,蚌埠233042

出　　处：《仪器仪表学报》2007年第3期529-533,共5页Chinese Journal of Scientific Instrument

摘　　要：本文介绍了基于总线集成控制技术设计的SOI器件高温环境实验装置的智能控制系统。该系统集信号检测、实时全程监控、自动记录及故障报警等功能于一体,完全满足SOI器件对高温环境实验的要求。实验表明,经过该系统测试后的产品性能,在可靠性、精确度和工作效率等方面,比现有人工定时定机监测方式有明显的改善和提高。An intelligent control system of high temperature environmental test for SOI device is introduced, which is based on the technology of bus integration. This system features the functions such as signal acquisition, real-time process control, automatic recording, and automatic error alarming, which completely satisfy the requirements of high temperature environmental test for SOI device and others. Comparing with currently used regular, manual test method, with the proposed system the product performance such as reliability, measurement precision and working efficiency are improved greatly.

关 键 词：SOI器件 高温环境实验 动态监控 总线 

分 类 号：TP216.1[自动化与计算机技术—检测技术与自动化装置]