微机电系统磁流体压力微传感器  

Pressure micro-sensor with magnetic fluid in MEMS

作　　者：徐军民[1] 王瑞金[1] 杨娅君[1] 

机构地区：[1]浙江科技学院机械与汽车工程学院,浙江杭州310012

出　　处：《机电工程》2007年第4期75-77,共3页Journal of Mechanical & Electrical Engineering

摘　　要：由于磁流体具有磁性，如果在磁场作用下力的平衡发生变化，会因磁流体的流动而产生压力。将这种现象用到微系统中，可以获得1～1000mbar数量级的压力值。在试验装置中，用压阻式压力传感器得到了40mbar的压力。试验结果表明，磁流体和微系统的结合具有很大的潜能，为其应用于新的场合提供了研究基础。Magnetic fluid is fluid with magnetic properties. By applying a magnetic field, the balance of forces within the magnetic fluid is varied so that the magnetic fluid can move or apply pressure. These capabilities can be used in the field of the mierosystems. The typical pressure values of order of 1 - 1 000 mbar was expected from magnetic fluid. Using a piezoresistive pressure sensor, a pressure of 40 mbar was obtained in the experimental setup. The results of the preliminary experiment show a high potential in combining both magnetic fluid and mierosystems and therefore, further research is under development for new applications.

关 键 词：微机电系统 磁流体 微致动器 磁压 微压力传感器 

分 类 号：TP212.12[自动化与计算机技术—检测技术与自动化装置]