多孔硅反射谱的测量与分析  

The Measurement and Analysis of the Optical Reflectance Spectra of PS

作　　者：晁战云[1] 徐伟弘[1] 唐洁影[1] 江开源 

机构地区：[1]东南大学电子工程系,南京210096

出　　处：《固体电子学研究与进展》1997年第1期50-54,共5页Research & Progress of SSE

摘　　要：测量了多孔硅的光反射谱，并进行了分析和讨论，得出了其能带展宽等特性。利用K－K关系，计算得出了多孔娃的折射率n等光学常数，并结合单晶硅的相应光学常数进行了比较和分析．The optical reflectance spectra of PS is measured and analyzed. The result shows that the bandgap of PS has been broadened. Index of refraction n and other optical constants of PS are obtained by calculation with the Kramers-Kroning relation. A comparison between the optical constants of PS and that of crystal sili-con is made.

关 键 词：多孔硅 K-K关系 反射谱 半导体能带结构 

分 类 号：O471.5[理学—半导体物理] TN304.12[理学—物理]