采用单边大光腔结构改善电吸收调制器的光场分布  

Improving the optical profile of electroabsorption modulator using single-sided large optical cavity structure

作　　者：杨华[1] 朱洪亮[1] 潘教青[1] 冯文[1] 谢红云[1] 周帆[1] 安欣[1] 边静[1] 赵玲娟[1] 陈娓兮[1] 王圩[1] 

机构地区：[1]中国科学院半导体研究所,国家光电子集成重点实验室,北京100083

出　　处：《物理学报》2007年第5期2751-2755,共5页Acta Physica Sinica

基　　金：国家重点基础研究发展规划(973)项目(批准号:G2000068301);国家高技术研究发展计划(863)项目(批准号:2002AA312150);国家自然科学基金(批准号:90101023;60176023;60476009)资助的课题~~

摘　　要：设计并制备了具有单边大光腔结构的半导体电吸收(electroabsorption,EA)调制器.模拟和测试的结果均表明:单边大光腔结构能有效地改善EA调制器的光场分布,使椭圆形的近场光斑变得圆形化,从而达到与圆形模式光纤之间的匹配,有利于提高耦合效率.An electroabsorption modulator with large optical cavity was designed and fabricated successfully. Both the simulated and experimental results show that, the larger optical cavity structure introduced could obviously improve the optical profile of EA modulator, the traditional elliptical near-field spot becomes more rounded, so it will match better with the optical fiber and is beneficial for raising the coupling efficiency.

关 键 词：单边大光腔 电吸收(EA)调制器 光场分布 耦合效率 

分 类 号：O472.3[理学—半导体物理]