采用双等离子体制备非晶态碳膜的研究  

INVESTIGATION ON AMORPHOUS CARBON FILMS FABRICATED BY DUAL PLASMA TECHNIQUE

作　　者：王耀辉[1] 张旭[1] 吴先映[1] 徐元直[1] 张荟星[1] 张孝吉[1] 

机构地区：[1]北京师范大学射线束技术和材料改性教育部重点实验室北京师范大学低能核物理研究所北京市辐射中心,北京100875

出　　处：《北京师范大学学报（自然科学版）》2007年第2期154-157,共4页Journal of Beijing Normal University(Natural Science)

基　　金：国家自然科学基金资助项目(50141022)

摘　　要：采用直流金属磁过滤阴极真空弧（FCVA）制造出Ti和乙炔（C2H2）气体的双等离子体在单晶硅（100）上制备非晶态碳膜．重点研究了乙炔气体和过滤线圈电流对非晶态碳膜的结构、形貌和机械性能的影响．研究结果表明，薄膜中主要成分是TiC，并以（111）作为主晶向；随着过滤线圈电流的增大，薄膜的晶粒度越来越小；薄膜表面的粗糙度逐渐减小，变得更加平整；薄膜的应力减小，可以下降到2．5GPa．薄膜的显微硬度和弹性模量随着C2H2体积流qy（C2H2）的增大而降低，硬度和弹性模量分别可以达到33．9GPa和237．6GPa．非晶态碳膜的摩擦因数在0．1～0．25之间，大大低于衬底材料单晶硅片的摩擦因数0．6．随着过滤线圈电流增大，摩擦因数减小．Direct current metal filtered cathodic vacuum arc （FCVA） and acetylene gas （C2H2） are wielded to synthesize amorphous carbon films on Si （100）. The influence of acetylene flow rate on the microstructure, morphology and mechanical properties of the films are investigated. The results show that the phase of TiC in the （111） preferential crystallographic orientation is embedded in the film; with an increasing filter coil current, the grain size of film gradually becomes smaller and the content of TiC phase gradually reduces; the RMS roughness of film is smaller; the stress of film gradually becomes smaller and the value of stress could reduce to 2. 5 GPa in our experiment. The micro-hardness and elastic modulus of film decrease with an increasing acetylene flow rate, and the value of them can reach to aa. 9 GPa and 232.6 GPa, respectively. The friction coefficients of the amorphous carbon films are within a range of 0. 1-0.25, which are much lower than the friction coefficient of the substrate Si （0. 6）. And with the increasing filter coil current, the friction coefficient of the film reduces.

关 键 词：非晶态碳膜 磁过滤阴极真空弧 过滤线圈电流 乙炔的体积流量 结构和性能 

分 类 号：O53[理学—等离子体物理]