连续与脉冲激光诱导气相反应制备超细粉  

Synthesis of Ultrafine Powders Via Vapor-reaction Induced by CW and Pulsed Laser Beams

作　　者：金桂林[1] 张兆奎[1] 金晓英[1] 石庆红 陈鹏彬 

机构地区：[1]华东理工大学物理系,上海200237

出　　处：《应用激光》1997年第1期11-13,共3页Applied Laser

摘　　要：用连续以及脉冲的CO2激光诱导三甲基氯硅烷的气相化学反应，制备SiC超细粉．脉冲激光以及高的激光功率密度有助于减少副反应，得到高纯度、圆形、粒度小而均匀，疏松不团聚的超细粉。CW and pulsed CO2 laser beams were used to irradiate the vapor ofchlorotrimethylsilane,so as to induce its decomposition reaction and to prepare SiC ultrafine powders. The pulsed laser beam and the higher laser power density were useful to reduce the side-reactions and to get the ultrafine powders with high purity,round shape,small and homogeneoussize,and loose agglomeration.

关 键 词：激光 超细粉 碳化硅 三甲基氯硅烷 

分 类 号：TN24[电子电信—物理电子学]