半导体技术  

出　　处：《中国学术期刊文摘》2007年第10期143-144,共2页Chinese Science Abstracts(Chinese Edition)

摘　　要：ULSI用氟化类金刚石薄膜的研究,Ni-Al薄膜的制备和电性能研究,CMOS工艺片上传输线研究,基于神经网络模型的传感器非线性校正,激光直写凹球面网栅的电控实现……Study on fluorinated diamond-like carbon films for ULSI,Preparation and electrical properties of Ni-Al thin films,Design of on-chip transmission line in CMOS process,Nonlinear correction of sensors based on neural network model ,Realization of electric control of laser direct writing mesh on concave spherical substrate ……

关 键 词：半导体技术 氟化类金刚石薄膜 CMOS工艺 神经网络模型 NI-AL 非线性校正 ULSI 激光直写 

分 类 号：TN3[电子电信—物理电子学]