洁净厂房正压控制问题讨论  

The Control Problem of the Room Pressure Value in Cleanroom

作　　者：蒋茂[1] 潘国华[1] 王铁坤[1] 

机构地区：[1]无锡微电子科研中心,江苏无锡214035

出　　处：《电子与封装》2007年第5期33-37,共5页Electronics & Packaging

摘　　要：文章重点探讨了洁净厂房的正压值的控制问题,讨论了正压值与洁净度以及温度湿度之间的关系。根据现有洁净厂房的生产条件,分析了正压值和洁净度以及温湿度不能达标的具体原因。探索了实际生产中正压值控制的方法,并验证了其可行性。This paper discusses the control problem of the room pressure value of the cleanroom. The connection of room pressure, cleanliness, temperature and humidity is also discussed, Based on the existence condition of the workshop, the reason for which the room pressure value, cleanliness, temperature and humidity cannot reach the standard value is analyzed, The way of the control problems of room pressure value was explored and the feasibility is validated.

关 键 词：洁净厂房 洁净度 温湿度 正压 过滤器 

分 类 号：TN305.97[电子电信—物理电子学]