Cr/CrN/CrNC/CrC/Cr-DLC梯度膜层的研究  

Preparatipon of the Gradient Coating of Cr/CrN/CrNC/CrC/Cr-DLC and its Performance

作　　者：牛仕超[1] 余志明[1] 代明江[2] 林松盛[2] 候惠君[2] 李洪武[2] 

机构地区：[1]中南大学材料科学与工程学院,长沙410083 [2]广州有色金属研究院材料表面工程研究所,广州510651

出　　处：《中国表面工程》2007年第3期34-38,共5页China Surface Engineering

基　　金：国家科技部项目;国科发财字[2005]300号

摘　　要：采用中频磁控溅射结合离子源技术沉积Cr/CrN/CrNC/CrC/Cr-DLC膜层。利用扫描电镜(SEM)、电子能谱(EDS)、Raman光谱和俄歇深层剥层分别对膜层微观形貌、成分组成、键结构及梯度成分深层分布进行分析;采用努氏显微硬度计、摩擦磨损试验机、划痕仪及洛氏硬度计测评膜层机械性能。结果表明:采用中频磁控溅射可沉积出大面积Cr/CrN/CrNC/CrC/Cr-DLC梯度膜层;Cr溅射功率对C键结构影响不大,但表层DLC中Cr的含量和膜层厚度随中频功率增大而增大;随DLC中掺Cr量增多,膜层硬度及摩擦因数略有上升;采用梯度过渡层及掺入金属Cr提高了膜层附着力,但过高的中频功率使沉积离子能量偏高,膜层压应力增加反而降低了膜层附着性能。Gradient coatings of Cr/CrN/CrNC/CrC/Cr-DLC were deposited by Twin Middle Frequency Magnetron Sputtering （TMF-MS） method combined with ion source technique. Microstructure, composition, bond structure and gradient structure were characterized by SEM, EDS, Raman spectroscopy and Auger spectrometer respectively. Tribological properties were evaluated by Knoop Microhardness tester, friction and wear tester, scratching tester and Rockwell-C intender. The results showed that a large area gradient Cr/CrN/CrNC/CrC/Cr-DLC coating can be deposited by the hybrid technique. The C bond structure of the coatings is not obviously influenced by TMF-MS power. The concentration of Cr and thickness of the coatings is increased with the power of TMF-MS. The hardness of coatings is decreased with the increase of Cr in DLC, meanwhile the friction coefficient is slightly increased. The gradient interlayer and doped Cr can improve the adhesion of DLC films, however, the high MF power may lead to deterioration of adhesion due to high compression stress.

关 键 词：Cr-DLC 中频磁控溅射 离子源 附着力 

分 类 号：TG174.444[金属学及工艺—金属表面处理] TB43[金属学及工艺—金属学]