微机械加速度计失准角的精确测量  

Precise misalignment measurement of micromachined accelerometer

作　　者：胡淏[1] 董景新[1] 吴黎明[1] 万蔡辛[1] 

机构地区：[1]清华大学精密仪器与机械学系,北京100084

出　　处：《中国惯性技术学报》2007年第2期233-236,共4页Journal of Chinese Inertial Technology

基　　金：总装预先研究项目(51309050809)

摘　　要：在与国家军用标准测试方法对比分析的基础上,由空间解析几何理论建立了微机械加速度计外壳坐标系和敏感部件坐标系的数学模型,提出一种测量失准角的“六位置法”:利用六面体翻滚,测量加速度计在六个不同位置下的输出电压,通过一系列公式运算可以精确测得失准角。实验结果表明:该方法在失准角为1度的情况下,标度因数准确性可提高3.046×10^(-4),失准角准确性提高2.539×10^(-4),从而表明了计算方法的可行性和实际应用价值。目前该方法已经应用于实验室成表测试。A Space Analytic Geometrical model of transform between two important coordinates were constructed compared with the traditional method in military standard. Base on that, a novel method of precise misalignment angles measurement was brought up which used the outputs in six positions, and the precise result can be given. The experiment gives a perfect proof of this novel method. Take 1° misalignment angles for example, the result accuracy of scale factor can be improved by 3.046×10^-4, and the accuracy of misalignment angles can be improved by 2. 539×10^-4, which show the effective and practical of the method.

关 键 词：微机械加速度计 失准角 标度因数 测量 敏感轴 

分 类 号：TH824[机械工程—仪器科学与技术]