平面无阀微泵的设计与制作  

Design and fabrication of plane valveless micropumps

作　　者：张宇峰[1] 张国威[1] 刘晓为[1] 陈伟平[1] 王喜莲[1] 王蔚[1] 倪鹤南[1] 

机构地区：[1]哈尔滨工业大学MEMS中心,哈尔滨150001

出　　处：《哈尔滨工业大学学报》2007年第6期936-939,共4页Journal of Harbin Institute of Technology

基　　金：国家自然科学基金资助项目(60276038)

摘　　要：依据扩散口/喷嘴理论,设计了具有单向整流特性的无阀微泵.采用硅平面工艺、各向异性腐蚀、削角补偿和静电键合等微机械加工工艺技术,制作了平面尺寸为18 mm×13 mm的无阀微泵.经过测试,当扩散口/喷嘴长度为2.5μm、扩散口/喷嘴的窄口宽度为150μm、腐蚀深度为150μm时,微泵的最大泵压达14.8 kPa,最大流量为558μL/m in.A valveless micropump with the unilateral rectification characteristic was designed according to the diffuser/nozzle theory. The valveless micropump was fabricated by MEMS technology including anisotropic etching, supplementary angle and anodic bonding, with the size of 18mm × 13mm. The tests of the micropump show that max pump pressure and flow rate reach to 14.8 kPa and 558 μL/min respectively, with the length, breadth and etching depth of diffuser/nozzle of 2.5 mm, 150 μm and 150 μm.

关 键 词：扩散口 喷嘴 无阀微泵 微机电系统 

分 类 号：TP271[自动化与计算机技术—检测技术与自动化装置]