压力传感器封装中波纹膜片的结构优化  

Structure optimization of corrugated diaphragm in pressure sensor packaging

作　　者：付兴铭[1] 谭六喜[1] 姚媛 刘胜[1] 

机构地区：[1]武汉光电国家实验室 [2]上海飞恩微电子有限公司,上海201203

出　　处：《传感器与微系统》2007年第7期80-81,84,共3页Transducer and Microsystem Technologies

摘　　要：对压力传感器隔离封装中的关键部件——波纹膜片,采用有限元分析的方法,分别得到了2,4,6个波纹的膜片的弹性特性,并根据封装要求选择了6波纹的膜片。通过比较不同波数的膜片对压力传感器输出信号的影响,验证了膜片结构优化的正确性。最后,使用6波纹的膜片进行封装,得到了性能稳定的压力传感器,并测试得到了其主要的静态参数。The corrugated diaphragm, one of the most important isolation packaging parts, is optimized in structure. Pressure-displacement curves of corrugated diaphragms with 2,4, 6 pitches are obtained by finite elements analysis （FEA）and the 6 pitch one is selected based on the packaging requirements. The optimization of corrugated diaphragm is testified by comparing the effects of diaphragms on the output of pressure sensors. At last, the 6 pitches diaphragm is conducted into packaging, and high stability pressure sensor is obtained.

关 键 词：压力传感器 波纹膜片 封装 有限元分析 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]